19 Akadeemia tee, Tallinn, ESTONIA
Telephone +372 6703703
Facsimile +372 6503340
e-mail neweks@estpak.ee
e-mail neweks@excimer.ee
LASER MEDIUM |
F2 |
ArF |
KrCl |
KrF |
XeCl |
N2 |
XeF |
UNIT |
WAVELENGTH |
157 |
193 |
222 |
248 |
308 |
337 |
351 |
nm |
PULSE ENERGY |
0.5 |
3.5 |
0.5 |
5.5 |
3.0 |
0.3 |
2.0 |
mJ |
AVERAGE POWER |
50 |
350 |
50 |
550 |
300 |
30 |
200 |
mW |
GAS FILL LIFETIME |
106 |
106 |
107 |
106 |
107 |
107 |
106 |
SHOTS |
PULSE DURATION - 5 ns (typical)
PEAK POWER - 1 MW
REPETITION RATE - up to ...100 Hz
PULSE-TO PULSE STABILITY - 3 %
BEAM DIMENSIONS - 2x2 mm
BEAM DIVERGENCE - 3.5x2 mrad
TIMING JITTER - 1 ns
POWER REQUIREMENTS - 220 and/or 115 Vac , 150 W
COOLING - air
DIMENSIONS - 30x26x21 cm
WEIGHT - 13.4 kg
Pulse energy and average power specified at gas fill lifetime finish
WARRANTY PSX-100 excimer lasers are warranted free from defects in materials and workmanship for 1 year from the date of delivery
© Neweks AS, 1991-2003