19 Akadeemia tee, Tallinn, ESTONIA

Telephone +372 6703703

Facsimile +372 6503340

e-mail neweks@estpak.ee

e-mail neweks@excimer.ee


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EXCIMER LASER PSX-100

POPULAR WORLDWIDE

LASER MEDIUM

F2

ArF

KrCl

KrF

XeCl

N2

XeF

UNIT

WAVELENGTH

157

193

222

248

308

337

351

nm

PULSE ENERGY

0.5

3.5

0.5

5.5

3.0

0.3

2.0

mJ

AVERAGE POWER

50

350

50

550

300

30

200

mW

GAS FILL LIFETIME

106

106

107

106

107

107

106

SHOTS

PULSE DURATION - 5 ns (typical)

PEAK POWER - 1 MW

REPETITION RATE - up to ...100 Hz

PULSE-TO PULSE STABILITY - 3 %

BEAM DIMENSIONS - 2x2 mm

BEAM DIVERGENCE - 3.5x2 mrad

TIMING JITTER - 1 ns

POWER REQUIREMENTS - 220 and/or 115 Vac , 150 W

COOLING - air

DIMENSIONS - 30x26x21 cm

WEIGHT - 13.4 kg

Pulse energy and average power specified at gas fill lifetime finish

WARRANTY PSX-100 excimer lasers are warranted free from defects in materials and workmanship for 1 year from the date of delivery


PSX-100 image© Neweks AS, 1991-2003